Metal Etchers
TECHNICS PLASMA ETCHER 200 WATT 13.65 MHz
Technics Micro Stripper Series 200 Plasma System
Metal Etchers
Technics Micro Stripper Series 200 Plasma System
Metal Etchers
Reactive Ion Etch System
BatchTop VII
Metal Etchers
Combination PECVD and Dual Plasma Etch/Reactive Ion Etch Processing Systems
Metal Etchers
Dual Plasma Etch and Reactive Ion Etch Processing Systems System consists of a process chamber, upper electrode (with gas feed), and substrate electrode.